DH-M01-AUTO Automated Measurement Platform
DH-M01-AUTO Automated Measurement Platform
Product Introduction
The DH-M01-AUTO is a standard‑type machine developed specifically to meet the inspection requirements of semiconductor chips. It features a high‑precision motion control system, an advanced imaging system, and image‑processing modules incorporating both general‑purpose and 3D algorithms, offering advantages such as high inspection accuracy, fast throughput, precise positioning, and a high defect detection rate.
Product positioning
● Fully automatic intelligent detection
● Traditional algorithms, with a high detection rate
● Mapping-based high-speed inspection performance can be imported and exported according to customer requirements, achieving a throughput of 6 seconds per unit based on the number of inspection items.
● Automatic saving of test records and images, with support for MES interfaces.
● Optional automatic loading and unloading system
Scope of Application
Primarily used in the back-end packaging processes of semiconductors.
It is commonly found in industries such as memory, defense electronics, power modules, optical communications, and sensor modules.
Product Specifications
| Performance Parameters | |
| Model | DH-M01-F |
| Maximum Detection Accuracy | 1 μm |
| Lens Configuration | Line Laser Sensor + 65-Megapixel Camera + High-Performance Dual Telecentric AOI Lens |
| Equipment Weight | ≈750KG |
| Detection Function | 3D Height Measurement |
| Throughput (UPH) | MAX: 600+ (Based on chip density) |
| Compatible Chip Size | Supports customized configurations for product types |
| Vision System Accuracy | ±1μm |
| Stage Repeatability | ±3μm |
| Overall Equipment Accuracy | ±5μm |
| Product Recognition Rate | 99.9% |
| Equipment Power | ≈4KW |
| Compressed Air | 0.5~0.6Mpa |
| Power Requirements | AC220V + UPS Dual Power System |
| Cleanliness Class | Class 100 / 1K optional |
| Software System | |
| Computer System | Windows 10 |
| Measurement Software | 3DMeasurementProj |
| Search Method | Mapping Pick-up (Optional) |
| Data Interface | Supports MES Interface (Optional) |
| Communication Protocol | Supports SECS/GEM Protocol (Optional) |
| Traceability Function | Product Information, Operation Records, Production Logs, etc. |
| Automatic Backup | The computer needs to backup related product production information, fault information, parameter information, etc. for traceability. |
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